Company News: bubbles & beyond and Fraunhofer Center Nanoelectronic Technologies collaborate on the development of novel, eco-friendly cleaning solutions for microelectronics
bubbles & beyond, a technology company focusing on customized intelligent fluids®, and Fraunhofer Center Nanoelectronic Technologies (CNT), Dresden, today announced their collaboration to jointly develop novel cleaning solutions for the microelectronics industry.
During the two-year collaboration, bubbles & beyond and Fraunhofer Center Nanoelectronic Technologies will create novel decoating products for semiconductor applications with the goal to provide a more efficient, more cost-effective and eco-friendly alternative to currently available surface treatments, which are primarily composed of aggressive chemicals. The novel cleaning approach is based on bubbles & beyond’s proprietary phase fluid technology (intelligent fluids®), which is already used successfully for other microelectronic applications. Fraunhofer CNT brings the necessary semiconductor expertise, the respective research know-how and comprehensive, highly precise measurement analysis to the project.
The collaboration focuses on the assessment and optimization of the efficacy of customized cleaning solutions. Moreover, semiconductor-specific criteria will be analyzed, e.g. critical materials, process stability and contamination risks. Based on the findings, it will be examined if the new technology is suitable for the removal of lithographic laquers. Subsequently, the assessment will be expanded to other process steps.